Fabrication of self-aligned metallic Coulomb blockade devices on Si nanowires

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3800-3803

  Ford, E M ^a   Ahmed, H ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040405976     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590411     Document Type: Article

References (9)

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7. R. G. Woodham and H. Ahmed, J. Vac. Sci. Technol. B 12, 3280 (1994).
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9. C. Vieu (private communication).