Gold nanograins deposited from a liquid metal ion source

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 349-352

  Vieu, C ^b   Gierak, J ^b   David, C ^b   Lagadec, Y ^b   Bourlange, A ^b   Larigaldie, D ^b   Wang, Z ^b   Flicstein, J ^a   Launois, H ^b  

^a ORANGE LABS   (France)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRON DEVICE MANUFACTURE; ELECTRON EMISSION; ION IMPLANTATION; ION SOURCES; LIQUID METALS; NANOSTRUCTURED MATERIALS; SPUTTERING;

COULOMB BLOCKADE DEVICES; DROPLETS EMISSIONS; GOLD NANOGRAMS; LIQUID METAL ION SOURCE;

GOLD;

EID: 0031074684     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00106-2     Document Type: Article

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