A common-path heterodyne interferometer for surface profiling in microelectronic fabrication

Review of Scientific Instruments

Volumn 72, Issue 5, 2001, Pages 2455-2466

  Klein, Eric J ^a   Ramirez, W Fred ^a   Hall, John L ^b  

^a UCB 450   (United States)

^b UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040154515     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1367353     Document Type: Article

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