Interferometrical profilometry at surfaces with varying materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue II, 1999, Pages 1009-1016

  Jennewein, H ^a   Gottschling, H ^a   Ganz, T ^a   Tschudi, T ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; ERROR COMPENSATION; HETERODYNING; SIGNAL DETECTION;

ACOUSTOOPTICAL DEFLECTORS; HETERODYNE INTERFEROMETRY; MICRO-ELLIPSOMETRY; OPTICAL PROFILOMETRY;

INTERFEROMETRY;

EID: 0032629256     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350789     Document Type: Conference Paper

References (7)