Spectroscopic optical emission tomography of direct-current magnetron sputtering discharges in argon-nitrogen gas mixtures

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 927-932

  Debal, F ^a   Wautelet, M ^a   Dauchot, J P ^a   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

Author keywords

Glow discharge; Magnetron discharge; Optical emission spectrometry; Radio frequency discharge; Tomography

Indexed keywords

ALUMINUM ALLOYS; ARGON; CATHODES; COMPOSITION EFFECTS; ELECTRIC CURRENTS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; LIGHT EMISSION; MAGNETIC FIELD MEASUREMENT; NITROGEN; PRESSURE EFFECTS; TOMOGRAPHY;

SPECTROSCOPIC OPTICAL EMISSION TOMOGRAPHY;

MAGNETRON SPUTTERING;

EID: 0039763659     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00286-8     Document Type: Article

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