Phase selective deposition and microstructure control in iron oxide films obtained by single-source CVD

Chemical Vapor Deposition

Volumn 8, Issue 6, 2002, Pages 277-283

  Mathur, Sanjay ^a   Veith, Michael ^a   Sivakov, Vladimir ^a   Shen, Hao ^a   Huch, Volker ^a   Hartmann, Uwe ^a   Gao, Hai Bin ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

Iron oxides; Microstructures; Single source CVD

Indexed keywords

ABSORPTION SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; IRON OXIDES; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; X RAY DIFFRACTION;

BULK PHASES; PHASE SELECTIVITY; REACTIVE SPUTTERING; SPRAY PYROLYSIS;

THIN FILMS;

EID: 0038897230     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(20021203)8:6<277::AID-CVDE277>3.0.CO;2-8     Document Type: Article

References (58)

1. R Ao, L. Kummerl, D Haarer, Adv. Mater. 1995, 7, 495.
2. H. Hibst, J Magn. Magn Mater. 1988, 74, 193.
3. F. N. Bradley, Materials for Magnetic Functions, Hayden, New York 1976.
4. H Sun, C. Cantalini, M Faccio, M. Pelino, M. Catalano, L. Tapfer, J. Am. Ceram Soc 1996, 79, 927
5. Nanoparticles and Nanostructured Films (Ed: J. H. Fendler), Wiley-VCH, Weinheim 1998.
6. E. Matijevic, Chem. Mater. 1993, 5, 412.
7. N. Mounien, M.-P. Pileni, Chem. Mater. 1996, 8, 1128.
8. T Kiyomura, M. Gormi, J. Phys. IV 1997, 7, C1-611.
9. Y. S Kang, S. Risbud, J. F Rabott, P. Stroeve, Chem Mater 1996, 8, 2209.
10. G. Wirnsberger, K. Gatterer, P. Behrens, J. Mater. Chem. 1998, 8, 1509
11. M. Izaki, O. Shinoura, Adv. Mater. 2001, 13, 142
12. B. Pal, M. Sharon, Thin Solid Films 2000, 379, 83.
13. C. Baratto, P. P. Lottici, D Bersani, G. Antonioli, G. Gnappi, A. Montenero, J. Sol-Gel Sci Technol. 1998, 13, 667.
14. K. Kojima, M. Miyazaki, F. Mizukami, K. Maeda, J Sol-Gel Sci. Technol. 1997, 8, 77.
15. T. Hashimoto, T Yamada, T. Yoko, J. Appl. Phys. 1996, 80, 3184.
16. Y. Gao, Y J. Kim, S A. Chambers, J. Mater. Res. 2001, 13, 1998
17. X Cao, R. Prozorov, Y. Koltypin, G. Kataby, I Felner, A Gedanken, J. Mater. Res 1997, 12, 402.
18. T. Yogi, C. Tsang, T A Nguyen, K. Ju, G. L. Gorman, C. Castillo, IEEE Trans Magn 1990, 26, 2271
19. D. M. Lind, S. D. Berry, G. Chern, H. Mathias, L. R. Testardi, Phys. Rev. B 1992, 45, 1838.
20. T. S. Chin, N. C. Chiang, J. Appl. Phys. 1997, 81, 5250.
21. S. R. Shinde, S. D. Kulkarni, A. G. Banpurkar, R. Nawathey-Dixit, S. K. Date, S. B. Ogale, J. Appl. Phys. 2000, 88, l566.
22. L. Armelao, R. Bertoncello, L. Crociati, G. Depaoli, G. Granozzi, E. Tondello, M. Bettinelli, J. Mater. Chem. 1995, 5, 78.
23. C. Pascal, J. L. Pascal, F. Favier, M. L. Elidrissi Moubtassim, C. Payen, Chem. Mater. 1999, 11, 141.
24. P. Matteazzi, G. Le Caer, Mater. Sci. Eng. 1991, AI49, 135.
25. Z. X. Tang, S. Nafis, C. M. Sorensen, G. C Hadjipanayis, K. J. Klabunde, J. Magn. Magn. Mater. 1989, 80, 285.
26. S. Dhara, A. C. Rastogi, B. K. Das, Thin Solid Films 1994, 239, 240
27. K. Kandori, N. Ohkasi, A. Yasukawa, I. Ishikawa, J. Mater. Res. 1998, 13, 1698.
28. M. P. Morales, C. de Julien, J. M. Gonzalez, C. J Serna, J. Mater. Res. 1994, 9, 135.
29. M. P. Morales, J. M. Gonzalez, C. J. Serna, J. Mater. Res. 1992, 7, 2538.
30. M. V. Cabanas, M. Vallet-Rogi, M Labeau, J. M. Gonzalez-Calbet, J. Mater. Res. 1993, 8, 2694.
31. M. M. Ibrahim, J. Zhao, M. S. Seehra, J. Mater Res. 1992, 7, 1856
32. M. Veith, Mater. Sci. Forum 2000, 343-346, 531.
33. A. C. Jones, T. J. Leedham, J. Brooks, H. O. Davies, J. Phys. IV 1999, 9, 553.
34. CVD of Nonmetals (Ed: W. S. Rees), Wiley-VCH, Weinheim 1996.
35. A. Devi, W. Rogge, R. A Fischer, F. Stowasser, H. Sussek, H. W. Becker, J. Schaefer, J. Wolfrum, J. Phys. IV 1999, 9, 589.
36. S. Mathur, M. Veith, H. Shen, N. Lecerf, S. Hufner, Scr. Mater. 2001, 44, 2105.
37. N. Lecerf, S Mathur, H. Shen, M. Veith, S Hüfner. Scr. Mater. 2001, 44, 2157
38. S. Mathur, M Veith, V. Sivakov, H Shen, H B Gao, J. Phys. IV 2001, II, Pr3-487
39. F. Graetz, Ph.D Thesis, Saarland University Saarbrücken, Germany 2001.
40. M Veith, S. Kneip, A. Jungmann, S. Hüfner, Z. Anorg Allg. Chem. 1997, 623, 1507.
41. M Veith, S. Mathur, N. Lecerf, K Bartz, M. Heintz, V. Huch, Chem. Mater, 2000, 12, 271.
42. M. Veith, S. Mathur, N. Lecerf, H. Shen, S. Huefner, Chem. Mater. 1999, 11, 3103.
43. F. Meyer, R. Hempelmann, S. Mathur, M. Veith, J. Mater Chem 1999, 9, 1755.
44. M. Veith, S. Mathur, A Kareiva, M. Jillavi, M. Zimmer, V. Huch, J. Mater. Chem. 1999, 9, 3069.
45. X. Li, E. Lin, C. Zhang, S. Li, J. Mater. Chem. 1995, 5, 1953
46. D D. C. Bradley, Chem. Rev. 1989, 89, 1317.
47. M. A. Cameron, S M. George, Thin Solid Films 1999, 348, 90.
48. International Center for Diffraction Data ICDD, Powder Diffraction File, Newtown Square PA, USA.
49. T. Fuji, F. M. F. De Groot, G. A. Sawatzky, F C Voogt, T. Hibma, K. Okada. Phys. Rev. B 1999, 59, 3195.
50. B. Balko, G. R. Hoy, Phys. B & C 1977, 86-88, 953.
51. M. O. Krause, J H. Oliver. J. Phys Chem. Ref Data 1979, 8, 329.
52. S. Arajs, N Amin, E. E Anderson, J Appl Phys. 1991, 69, 5122
53. Q. Chen, Z. J. Zhang, Appl. Phys. Lett. 1998, 73, 3156
54. S. H. Liou, S S. Malhotra, J. Moreland, P F. Hopkins, Appl. Phys. Lett. 1997, 70, 135.
55. I. Balberg, J I. Pankove, Phys. Rev. Lett 1971, 27, 596
56. X. Zhang, J Schoenes, P. Wachter, Solid State Commun. 1981, 39, 189.
57. H. Miyoshi, H Yoneyama, J. Chem. Soc., Faraday Trans. 1989, 85, 1873.
58. R F Ziolo, E. P. Giannelis, B. A Weinstein, M. P O'Horo, B. N. Ganguly, V. Mehrotra, M. W. Russell D. R. Huffman, Science 1992, 257, 291