Characterization of a molybdenum oxide sputtered thin film as a gas sensor

Thin Solid Films

Volumn 307, Issue 1-2, 1997, Pages 148-151

  Ferroni, Matteo ^a   Guidi, Vincenzo ^a   Martinelli, Giuliano ^a   Nelli, Paolo ^b   Sacerdoti, Michele ^a   Sberveglieri, Giorgio ^b  

^a UNIVERSITY OF FERRARA   (Italy)

^b UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Gas sensor; Molybdenum; Sputtering; Thin film

Indexed keywords

CARBON MONOXIDE; CHEMICAL SENSORS; MOLYBDENUM COMPOUNDS; SPUTTERING; THIN FILMS;

MOLYBDENUM OXIDE;

SEMICONDUCTING FILMS;

EID: 0031248403     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00279-4     Document Type: Article

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