Defect characteristics by boron cluster ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 855-860

  Aoki, Takaaki ^a   Matsuo, Jiro ^a   Takaoka, Gikan ^a   Toyoda, Noriaki ^b   Yamada, Isao ^a,b  

^a KYOTO UNIVERSITY   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; COMPUTER SIMULATION; ION BOMBARDMENT; ION IMPLANTATION; MONOMERS;

DAMAGE DENSITY;

POINT DEFECTS;

EID: 0038750912     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00878-4     Document Type: Conference Paper

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