SCOPUS 정보 검색 플랫폼

Volumn 169-170, Issue , 2003, Pages 49-52

Enhancement of shielded cathodic arc deposition

Author keywords

Deposition rate; Magnetic configuration; Plasma transportation; Shielded cathodic arc deposition; Titanium nitride

Indexed keywords

CATHODES; ELECTRIC COILS; ELECTRIC SHIELDING; MAGNETIC FIELD EFFECTS; PERMANENT MAGNETS; PLASMA APPLICATIONS; THIN FILMS; TITANIUM NITRIDE;

PLASMA TRANSPORTATION;

ELECTRIC ARCS;

CATHODIC ARC PLASMA DEPOSITION; COATING; DEPOSITION; PLASMA TREATMENT; SURFACE TREATMENT;

EID: 0038685891 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00079-3 Document Type: Article

Times cited : (8)

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