High-temperature interaction of nitrogen with thin iron films: Thermal desorption kinetics studies combined with microstructure analysis of Fe-N films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 3, 2003, Pages 545-552

  Lisowski, W ^a   Keim, E G ^b   Smithers, M A ^b  

^a INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CRYSTAL MICROSTRUCTURE; DESORPTION; HEATING; HIGH TEMPERATURE EFFECTS; MASS SPECTROMETRY; MOLECULAR DYNAMICS; POLYCRYSTALLINE MATERIALS; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

IRON NITRIDE FILMS; MICROSTRUCTURE ANALYSIS; MOLECULAR STATES; THERMAL DESORPTION MASS SPECTROMETRY;

IRON COMPOUNDS;

EID: 0038613501     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1559918     Document Type: Article

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