Effect of oxygen on the formation of Fe16N2 sputtered films

Journal of Magnetism and Magnetic Materials

Volumn 232, Issue 1-2, 2001, Pages 18-26

  Takahashi, Yukiko ^a   Katou, Masafumi ^a   Shoji, Hiroki ^a   Takahashi, Migaku ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Oxygen atoms; Reactive sputtering; Saturation magnetization; Ultra clean process

Indexed keywords

IRON COMPOUNDS; MAGNESIA; MAGNETIZATION; OXYGEN; SINGLE CRYSTALS; SPUTTERING;

GRAIN ORIENTATION; IRON NITRIDE; ULTRACLEAN PROCESS;

MAGNETIC FILMS;

EID: 0034965915     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-8853(01)00204-9     Document Type: Article

References (27)