Design and characterization of two-axis rotational micromirrors using multi-user microelectromechanical system processes

Journal of Microlithography, Microfabrication and Microsystems

Volumn 1, Issue 1, 2002, Pages 70-77

  Lin, Julianna E ^a   Sharma, Vikas ^a   MIchael, Feras S J ^b   Kirk, Andrew G ^b  

^a MCGILL UNIVERSITY   (Canada)

^b Xanoptix Inc   (United States)

Author keywords

Electrostatic actuation; MEMS; Mirau interferometry; Rotational micromirror; Surface micromachining

Indexed keywords

EID: 0038593616     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1445799     Document Type: Article

References (13)

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