Growth and defect reduction of bulk SiC crystals

Materials Science Forum

Volumn 389-393, Issue 1, 2002, Pages 29-34

  Ohtani, Noboru ^a   Fujimoto, Tatsuo ^a   Katsuno, Masakazu ^a   Aigo, Takashi ^a   Yashiro, Hirokatsu ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

Diameter enlargement; Low angle grain boundaries; Micropipes; Stacking faults

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH; CRYSTAL STRUCTURE; DEFECT DENSITY; GRAIN BOUNDARIES; STACKING FAULTS;

LOW ANGLE GRAIN BOUNDARIES; MICROPIPES; PHYSICAL VAPOR TRANSPORT GROWTH; STACKING FAULT FORMATION; CRYSTALLOGRAPHIC DEFECTS; DIAMETER ENLARGEMENT; FORMATION MECHANISM; PHYSICAL VAPOR TRANSPORT GROWTHS; QUALITY IMPROVEMENT; THERMAL PROFILES;

SILICON CARBIDE;

EID: 0038563939     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.389-393.29     Document Type: Article

References (11)

1. D. Hobgood, M. Brady, W. Brixius, G. Fechko, R. Glass, D. Henshall, J. Jenny, R. Leonard, D. Malta, St.G. Müller, V. Tsvetkov and C.H. Carter, Jr.: Mater. Sci. Forum Vol. 338-342 (2000), p. 3.
2. W.M. Vetter and M. Dudley: J. Appl. Cryst. Vol. 34 (2001), p. 20.
3. N. Ohtani, J. Takahashi, M. Katsuno, H. Yashiro and M. Kanaya: Mater. Res. Soc. Symp. Proc. Vol. 510 (1998), p. 37.
4. N. Ohtani, M. Katsuno, T. Fujimoto, T. Aigo and H. Yashiro: J. Cryst. Growth Vol. 226 (2001), p. 254.
5. J. Takahashi, N. Ohtani and M. Kanaya: J. Cryst. Growth Vol. 167 (1996), p. 596.
6. N. Ohtani, M. Katsuno, J. Takahashi, H. Yashiro and M. Kanaya: Phys. Rev. B Vol. 59 (1999), p. 4592.
7. M. Katsuno, N. Ohtani, T. Aigo, T. Fujimoto, H. Tsuge, H. Yashiro and M. Kanaya: J. Cryst. Growth Vol. 216 (2000), p. 256.
8. N. Ohtani, M. Katsuno, T. Fujimoto, H. Tsuge, T. Aigo and H. Yashiro: Extended Abstracts of 1st International Workshop on Ultra-Low-Loss Power Device Technology (UPD2000), p. 14 (Nara, Japan, 2000).
9. H. Yano, T. Hirano, T. Kimoto, H. Matsunami, K. Asano and Y. Sugawara: Mater. Sci. Forum Vol. 338-342 (2000), p. 1105.
10. J. Takahashi and N. Ohtani: phys. stat. sol. (b) Vol. 202 (1997), p. 163.
11. J. Takahashi, N. Ohtani, M. Katsuno and S. Shinoyama: J. Cryst. Growth Vol. 181 (1997), p. 229.