Application of MEMS technologies to nanodevices

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 3, Issue , 2003, Pages

  Doherty, Lance ^b   Liu, Hongbing ^a   Milanović, Veljko ^a  

^a Adriatic Research Institute   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BIOMEDICAL ENGINEERING; CAPILLARITY; FABRICATION; INTEGRATED CIRCUITS; POROSITY; SILICON; SINGLE CRYSTALS; THERMOELECTRICITY;

NANODEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0038420810     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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