Design and fabrication of a silicon-based MEMS rotary engine

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 3447-3452

  Fu, Kelvin ^a   Knobloch, Aaron J ^a   Martinez, Fabian C ^a   Walther, David C ^a   Fernandez Pello, Carlos ^a   Pisano, Al P ^a   Liepmann, Dorian ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRONS; GEARS; LITHIUM BATTERIES; REACTIVE ION ETCHING; ROTARY ENGINES; ROTORS; SILICON; SILICON ON INSULATOR TECHNOLOGY;

COMPRESSION RATIOS; ENERGY DENSITY;

MICROELECTROMECHANICAL DEVICES;

EID: 1542726039     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Waitz, I.A., Gauba, G., Tzeng, Y-S., 1996, "Combustors for Micro-Gas Turbine Engines", Proceedings of the ASME Aerospace Division.
2. Fu, K., Knobloch, A. J., Martinez, F.C., Walther, D. C., Fernandez-Pello, C., Pisano, A.P., Liepmann, D., Miyasaka, K., Maruta, K., 2001, "Design and Experimental Results of Small-Scale Rotary Engines", Proceedings, accepted to 2001 International Mechanical Engineering Congress and Exposition.
3. Fu, K., Knobloch, A. J., Cooley, B. A., Walther, D. C., Fernandez-Pello, C., Liepmann, D., Miyasaka, K., 2001, "Microscale Combustion Research for Applications to MEMS Rotary IC Engine", Proceedings,. 2001 National Heat Transfer Conference.
4. th ed., McGraw-Mll, New York.
5. Ansdale, R.F., Lockley, D.J., 1969, The Wankel RC Engine, A.S. Barnes and Company, South Brunswick.
6. Gray, H.L., 1973, "Guidance Means for a Rotary Engine or Pump", U.S. Patent 3,884,600.
7. Norbye, J.P., 1971, The Wankel Engine: Design, Development, Applications, Chiton Book Co.
8. Hynes, A.M., Ashraf, H., Bhardwaj, J.K., Hopkins, J., Johnston, I., Shepherd, J.N., 1999, "Recent Advanced in Silicon Etching for MEMS Using the ASE Process", Sensors and Actuators, 74, pp. 13-17.
9. Stoldt, C. R., Carraro, C., Ashuret, W. R., Fritz, M. C., Gao, D., Maboudian, R., 2001, "Novel Low-Temperature CVD Process for Silicon Carbide MEMS", Proceedings, Transducers 2001, International Solid-Stale Sensors and Actuators Conference.