Innovative aspects in thin film technologies for nanostructured materials in gas sensor devices

Thin Solid Films

Volumn 436, Issue 1, 2003, Pages 52-63

  Taurino, A M ^a   Epifani, M ^a   Toccoli, T ^b   Iannotta, S ^b   Siciliano, P ^a  

^a Ist Microelettron Microsistemi   (Italy)

^b IFN CNR   (Italy)

Author keywords

Nano structure; Sol gel; Supersonic cluster beam deposition

Indexed keywords

CRYSTAL MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SILICON WAFERS; SOL-GELS; THIN FILMS; TITANIUM OXIDES;

SUPERSONIC CLUSTER BEAM DEPOSITION;

CHEMICAL SENSORS;

EID: 0038378861     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00525-X     Document Type: Conference Paper

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