Phase contrast x-ray microscopy at 4 keV photon energy with 60 nm resolution

Journal De Physique. IV : JP

Volumn 104, Issue , 2003, Pages 567-570

  Neuhausler U ^a   Schneider, G ^b   Ludwig, W ^a   Hambach, D ^c  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMIGRATION; INTEGRATED CIRCUIT LAYOUT; LIGHT ABSORPTION; MICROELECTRONICS; PHOTONS; X RAY OPTICS;

CONDENSER ZONE PLATE; PHASE CONTRAST X RAY MICROSCOPY; PHOTON ENERGY;

X RAY MICROSCOPES;

EID: 0038363742     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:20030145     Document Type: Conference Paper

References (11)

1. Schmahl G., Rudolph D., Schneider G., Guttmann P. and Niemann B., Optik 97, No. 4 (1994) 181 - 182.
2. Schneider G., Denbeaux G., Anderson E., Bates B., Pearson A., Meyer M., Zschech E., Hambach D. and Stach E., Appl. Phys. Lett. 81(14) (2002) 2535 - 2537.
3. Schneider G., Hambach D., Niemann B., Kaulich B., Susini J., Hoffmann N. and Hasse W., Appl. Phys. Lett. 78(13) (2001) 1936 - 1938.
4. Kaulich B., Wilhein T., Oestreich S., Di Fabrizio E., Gentili M., Charalambous P., Salomé M., Barrett R. and Susini J., Appl. Phys. Lett. 75(26) (2000) 4061 - 4063.
5. Oestreich S., Kaulich B. and Susini J., Rev. Sci. Instrum. 70 (1999) 1921 - 1925.
6. Hambach D., Schneider G. and Neuhäusler U., publication in preparation.
7. Zernike F., Z. f. techn. Physik, Nr.11 (1935) 454 - 457.
8. Schneider G., Neuhäusler U., Ludwig W. and Hambach D., publication in preparation.
9. Neuhäusler U., Schneider G., Ludwig W., Meyer M.A., Zschech E. and Hambach D., "X-ray microscopy in Zernike phase contrast mode at 4 keV photon energy with 60 nm resolution", Proceedings of the X-TOP 2002 conference on high resolution diffraction and imaging, Grenoble and Aussois, 10.-14.9.2002, submitted to J. Phys. D.
10. Panitz M., Schneider G., Peuker M., Hambach D., Kaulich B., Oestreich S., Susini J. and Schmahl G., "Electroplated gold zone plates as X-ray objectives for photon energies of 2 - 8 keV" Proceedings of the 6th International Conference on X-ray microscopy, Berkeley, CA, August 1 - 6, 1999, W. Meyer-Ilse, T. Warwick and D. Attwood (American Institute of Physics, Melville, NY), pp. 676 - 681.
11. Rau C., Neuhäusler U., Schneider G., Hignette O., Leupold O., publication in preparation.