Electronic structure and energy band offsets for ultrathin silicon nitride on Si(1 0 0)

Applied Surface Science

Volumn 216, Issue 1-4 SPEC., 2003, Pages 252-257

  Miyazaki, Seiichi ^a   Narasaki, Masahiro ^a   Suyama, Atushi ^a   Yamaoka, Masanori ^a   Murakami, Hideki ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Band offset; Defect density; Energy band gap; Photoelectron spectroscopy; Silicon nitride

Indexed keywords

BAND STRUCTURE; CHEMICAL VAPOR DEPOSITION; ELECTRONIC STRUCTURE; HETEROJUNCTIONS; INTERFACES (MATERIALS); SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

DEFECT DENSITY;

SILICON NITRIDE;

EID: 0038345965     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00377-5     Document Type: Conference Paper

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