Generation of a homogeneous plasma in a glow discharge with a hollow anode and a wide-aperture hollow cathode

Technical Physics Letters

Volumn 25, Issue 6, 1999, Pages 498-500

  Gavrilov, N V ^a,b   Emlin, D R ^a,b   Nikulin, S P ^a,b  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b INSTITUTE OF ELECTROPHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033244362     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1262528     Document Type: Article

References (10)

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10. J. A. Thornton and A. S. Penfold, Cylindrical Magnetron Sputtering, Academic Press, New York (1978), 113 pp.