Optical properties of the SiO-Co composite thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 3, 2003, Pages 1416-1417

  Lee, Jaeho ^a   Bang, Kyoung Yoon ^a   Kim, Ok Kyung ^a   Oh, Hye Keun ^a   An, Ilsin ^a   Choi, Chaungi ^b   Park, Chang Won ^b  

^a Hanyang University   (South Korea)

^b Samsung SDI   (South Korea)

Author keywords

Cobalt; Effective medium theory; Ellipsometry; SiO

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; COMPOSITE MATERIALS; COMPOSITION; DIELECTRIC PROPERTIES; ELLIPSOMETRY; LIGHT REFLECTION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SILICON WAFERS; SURFACE ROUGHNESS; VOLUME FRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EFFECTIVE MEDIUM APPROXIMATION (EMA);

THIN FILMS;

EID: 0038290673     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.1416     Document Type: Article

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