메뉴 건너뛰기




Volumn 14, Issue 2, 1996, Pages 374-379

Pulsed plasma deposition of chromium oxide/chromium-cermet coatings

Author keywords

[No Author keywords available]

Indexed keywords

CERMETS; CHROMIUM; CHROMIUM COMPOUNDS; CRYSTAL STRUCTURE; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; OXIDATION; PLASMA APPLICATIONS; SPUTTER DEPOSITION; ULTRAVIOLET SPECTROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0030107344     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580092     Document Type: Article
Times cited : (23)

References (21)
  • 8
    • 85033846686 scopus 로고    scopus 로고
    • private communication
    • W. Graf (private communication).
    • Graf, W.1
  • 10
    • 85033851658 scopus 로고
    • Ph.D. thesis, University of Hannover, Hannover, Germany
    • A. Helmbold, Ph.D. thesis, University of Hannover, Hannover, Germany, 1993.
    • (1993)
    • Helmbold, A.1
  • 15
    • 85033864274 scopus 로고    scopus 로고
    • note
    • Immediately before the deposition of each chromium layer the Cr target was cleaned in a pure Ar plasma. Thereby oxygen which has accumulated on the target surface was removed. This cleaning procedure was particulary necessary after the reactive sputtering of the chromium oxide layer since the Cr target was oxidized.
  • 19
    • 33746986397 scopus 로고
    • ICPDS, Newtown Square, PA
    • International Center of Powder Diffraction Data (ICPDS), Powder Diffraction File (ICPDS, Newtown Square, PA, 1994).
    • (1994) Powder Diffraction File


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.