Enhanced oxygen precipitation in silicon due to grown-in spatial inhomogeneities in the oxygen distribution

Applied Physics Letters

Volumn 78, Issue 2, 2001, Pages 180-182

  Wang, Zhihong ^a   Sinno, Talid ^a   Brown, Robert A ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038289789     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1339851     Document Type: Article

References (20)

1. T. Y. Tan, E. E. Gardner, and W. K. Tice, Appl. Phys. Lett. 30, 175 (1977).
2. H. Peibst and H. Raidt, Phys. Status Solidi 68, 253 (1981).
3. C. Maddalon-Vinante, E. Ehret, and D. Barbier, J. Appl. Phys. 79, 2707 (1996).
4. F. Shimura, Semicond. Semimet. 42, 577 (1994).
5. J. Esfandyari, C. Schmeiser, S. Senkader, G. Hobler, and B. Murphy, J. Electrochem. Soc. 143, 995 (1996).
6. T. Sinno and R. A. Brown, J. Electrochem. Soc. 146, 2300 (1999).
7. S. T. Pantelides, M. Ramamoorthy, and F. A. Reboredo, Electrochem. Soc. Proc. 99-1, 3 (1999).
8. S. Senkader, K. Jurkschat, P. R. Wilshaw, and R. Falster, Electrochem. Soc. Proc. 99-1, 281 (1999).
9. K. F. Kelton, Philos. Mag. Lett. 77, 337 (1998).
10. J. Esfandyari, J. Vanhellemont, and G. Obermeier, Electrochem. Soc. Proc. 99-1, 437 (1999).
11. A. F. Witt, M. Lichtensteiger, and H. C. Gatos, J. Electrochem. Soc. 120, 1119 (1983).
12. L. O. Wilson, J. Cryst. Growth 48, 435 (1980a).
13. L. O. Wilson, J. Cryst. Growth 48, 451 (1980b).
14. B. P. R. Marioton and U. Gösele, J. Appl. Phys. 63, 4661 (1988).
15. S. A. McQuaid, M. J. Binns, C. A. Londos, J. H. Tucker, A. R. Brown, and R. C. Newman, J. Appl. Phys. 77, 1427 (1995).
16. C. Y. Kung, W. Hsu, C. M. Liu, and R. H. Horng, Jpn. J. Appl. Phys., Part 1 36, 5025 (1997).
17. T. Sinno, Ph.D thesis, Massachusetts Institute of Technology, Cambridge, MA, 1998.
18. W. J. Taylor, T. Y. Tan, and U. M. Gösele, Appl. Phys. Lett. 59, 2007 (1991).
19. W. J. Taylor, U. M. Gösele, and T. Y. Tan, Mater. Chem. Phys. 34, 166 (1993).
20. L. C. Snyder, T. W. Corbett, P. Deak, and R. Wu, Proceedings of Defects in Electronic Materials (Materials Research Society, Boston, 1987), p. 179.