Influence of rapid thermal annealing and internal gettering on Czochralski-grown silicon. I. Oxygen precipitation

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2707-2711

  Maddalon Vinante, C ^a   Ehret, E ^a   Barbier, D ^a  

^a UNIVERSITÉ DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037952287     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361141     Document Type: Article

References (25)

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