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Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 678-681

Mechanical properties of compressively prestressed thin films extracted from pressure dependent ripple profiles of long membranes

(2) Kramer, Torsten a Paul, Oliver a

a UNIVERSITY OF FREIBURG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; COMPRESSIVE STRESS; COMPUTER SIMULATION; ELASTIC MODULI; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; STRAIN; THIN FILMS;

COMPRESSIVELY PRESTRESSED THIN FILM; ENERGY MINIMIZATION METHOD; PRESTRAIN;

MICROELECTROMECHANICAL DEVICES;

EID: 0038155442 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (16)

References (7)

1
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- Microfabricated structures for the in situ measurement of residual stress, Young's modulus and ultimate strain of thin films
- M. G. Allen, M. Mehregany, R. T. Howe, S. D. Senturia, "Microfabricated Structures for the In Situ Measurement of Residual Stress, Young's Modulus and Ultimate Strain of Thin Films", Appl. Phys. Lett., vol. 51, no. 4, pp. 241-243, 1987
- (1987) Appl. Phys. Lett. , vol.51 , Issue.4 , pp. 241-243
- Allen, M.G.¹ Mehregany, M.² Howe, R.T.³ Senturia, S.D.⁴

2
- 0024771422
- Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
- O. Tabata, K. Kawahata, S. Sugiyama, I. Igarashi, "Mechanical Property Measurements of Thin Films Using Load-Deflection of Composite Rectangular Membranes", Sens. Actuators, vol. A20, pp. 135-141, 1989
- (1989) Sens. Actuators , vol.A20 , pp. 135-141
- Tabata, O.¹ Kawahata, K.² Sugiyama, S.³ Igarashi, I.⁴

3
- 0026960770
- A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
- J. J. Vlassak, W. D. Nix, "A New Bulge Test Technique for the Determination of Young's Modulus and Poisson's Ratio of Thin Films", J. Mater. Res., vol. 7, no. 12, pp. 3242-3249, 1992
- (1992) J. Mater. Res. , vol.7 , Issue.12 , pp. 3242-3249
- Vlassak, J.J.¹ Nix, W.D.²

4
- 0029430046
- A new analytical solution for the load-deflection of square membranes
- D. Maier-Schneider, J. Maibach, E. Obermeier, "A New Analytical Solution for the Load-Deflection of Square Membranes", J. Microelectromech. Syst., vol. 4, no. 4, pp. 238-241, 1995
- (1995) J. Microelectromech. Syst. , vol.4 , Issue.4 , pp. 238-241
- Maier-Schneider, D.¹ Maibach, J.² Obermeier, E.³

5
- 0032164907
- Mechanical properties of thin films from the load deflection of long clamped plates
- V. Ziebart, O. Paul, U. Münch, J. Schwizer, H. Baltes, "Mechanical Properties of Thin Films from the Load Deflection of Long Clamped Plates", J. Microelectromech. Syst., vol. 7, no. 3, pp. 320-328, 1998
- (1998) J. Microelectromech. Syst. , vol.7 , Issue.3 , pp. 320-328
- Ziebart, V.¹ Paul, O.² Münch, U.³ Schwizer, J.⁴ Baltes, H.⁵

6
- 0031633288
- A novel method to measure Poisson's ratio of thin films
- V. Ziebart, O. Paul, U. Münch, H. Baltes, "A Novel Method to Measure Poisson's Ratio of Thin Films", Mater. Res. Soc. Symp. Proc., vol. 505, pp. 27-32, 1998
- (1998) Mater. Res. Soc. Symp. Proc. , vol.505 , pp. 27-32
- Ziebart, V.¹ Paul, O.² Münch, U.³ Baltes, H.⁴

7
- 0036646672
- Postbuckled micromachined square membranes under differential pressure
- T. Kramer, O. Paul, "Postbuckled Micromachined Square Membranes Under Differential Pressure", J. Micromech. Microeng., vol. 12, pp. 475-478, 2002
- (2002) J. Micromech. Microeng. , vol.12 , pp. 475-478
- Kramer, T.¹ Paul, O.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.