A novel pressure balanced microfluidic valve

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 2, Issue , 2002, Pages

  Quero, J M ^a   Luque, A ^a   Franquelo, L G ^a  

^a UNIVERSITY OF SEVILLE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTROSTATIC ACTUATORS; HIGH PRESSURE EFFECTS; MICROANALYSIS; VALVES (MECHANICAL);

AIR CHAMBER; MICROFLUIDIC VALVE; PRESSURE COMPENSATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0036287094     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Microflow devices and systems
2. Paraffin actuated surface micromachined valve
3. Thermally driven phase-change microactuation
4. Flow characteristics of a pressure-balanced microvalve
5. A novel micromachined magnetic membrane microfluid pump
6. A silicon microvalve with combined electromagnetic/electrostatic actuation
7. Surface micromachining microfluidics: Design, fabrication, packaging, and characterization
8. A novel bulk-micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display