Paraffin actuated surface micromachined valves

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 381-385

  Carlen, E T ^a   Mastrangelo, C H ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PARAFFINS; THERMAL EXPANSION;

MICROVALVES;

MICROACTUATORS;

EID: 0033707028     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)