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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 4 B, 2003, Pages 1933-1936

Metal-induced solid-phase crystallization of amorphous SiGe films on insulator

(6) Kanno, Hiroshi a Tsunoda, Isao a Kenjo, Atsushi a Sadoh, Taizoh a Yamaguchi, Shinya b Miyao, Masanobu a

a KYUSHU UNIVERSITY (Japan)

b HITACHI LTD (Japan)

Author keywords

Metal induced lateral crystallization; Needlelike crystal; Nickel silicide; Silicon germanium; Thin film transistor

Indexed keywords

ANNEALING; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; OPTICAL MICROSCOPY; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON COMPOUNDS; SILICA; THIN FILM TRANSISTORS; ULSI CIRCUITS;

METAL-INDUCED SOLID-PHASE CRYSTALLIZATION; NEEDLELIKE CRYSTAL; NOMARSKI OPTICAL MICROSCOPY;

AMORPHOUS FILMS;

EID: 0038010026 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.1933 Document Type: Article

Times cited : (18)

References (13)

1
- 0001247854
- S. Yamaguchi, N. Sugii, S. K. Park, K. Nakagawa and M. Miyao: J. Appl. Phys. 89 (2001) 2091.
- (2001) J. Appl. Phys. , vol.89 , pp. 2091
- Yamaguchi, S.¹ Sugii, N.² Park, S.K.³ Nakagawa, K.⁴ Miyao, M.⁵

2
- 0002426850
- J. Olivares, A. Rodriguez, J. Sangrador, T. Rodriguez, C. Ballesteros and A. Kling: Thin Solid Films 37 (1999) 51.
- (1999) Thin Solid Films , vol.37 , pp. 51
- Olivares, J.¹ Rodriguez, A.² Sangrador, J.³ Rodriguez, T.⁴ Ballesteros, C.⁵ Kling, A.⁶

3
- 0037479255
- (Korea)
- M. Miyao, T. Sadoh, S. Yamaguchi and S. K. Park: Proc. 2001 Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices, Cheju (Korea, 2001) p. 115.
- (2001) Proc. 2001 Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices, Cheju , pp. 115
- Miyao, M.¹ Sadoh, T.² Yamaguchi, S.³ Park, S.K.⁴

4
- 0030125315
- J. H. Kim and J. Y. Lee: Jpn. J. Appl. Phys. 35 (1996) 2052.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 2052
- Kim, J.H.¹ Lee, J.Y.²

5
- 36449009173
- S. W. Lee, Y. C. Jeon and S. K. Joo: Appl. Phys. Lett. 66 (1995) 1671.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1671
- Lee, S.W.¹ Jeon, Y.C.² Joo, S.K.³

6
- 36449009735
- B. Bian, J. Yie, B. Li and Z. Wu: J. Appl. Phys. 73 (1993) 7402.
- (1993) J. Appl. Phys. , vol.73 , pp. 7402
- Bian, B.¹ Yie, J.² Li, B.³ Wu, Z.⁴

7
- 36449004575
- C. Hayzelden and J. L. Batstone: J. Appl. Phys. 73 (1993) 8279.
- (1993) J. Appl. Phys. , vol.73 , pp. 8279
- Hayzelden, C.¹ Batstone, J.L.²

8
- 36449007964
- C. Hayzelden, J. L. Batsone and R. C. Cammarata: Appl. Phys. Lett. 60 (1992) 225.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 225
- Hayzelden, C.¹ Batsone, J.L.² Cammarata, R.C.³

9
- 0030128485
- S. W. Lee and S. K. Joo: IEEE Electron Device Lett. 17 (1996) 160.
- (1996) IEEE Electron Device Lett. , vol.17 , pp. 160
- Lee, S.W.¹ Joo, S.K.²

10
- 0001533333
- Z. Jin, G. A. Bhat, M. Yeung, H. S. Kwok and M. Wong: J. Appl. Phys. 84 (1998) 194.
- (1998) J. Appl. Phys. , vol.84 , pp. 194
- Jin, Z.¹ Bhat, G.A.² Yeung, M.³ Kwok, H.S.⁴ Wong, M.⁵

11
- 79956011313
- M. Miyasaka, K. Makihira, T. Asano, E. Polychroniadis and J. Stoemenos: Appl. Phys. Lett. 80 (2002) 944.
- (2002) Appl. Phys. Lett. , vol.80 , pp. 944
- Miyasaka, M.¹ Makihira, K.² Asano, T.³ Polychroniadis, E.⁴ Stoemenos, J.⁵

12
- 0000943307
- M. Miyao, M. Moniwa, K. Kusukawa and W. Sinke: J. Appl. Phys. 64 (1988) 3018.
- (1988) J. Appl. Phys. , vol.64 , pp. 3018
- Miyao, M.¹ Moniwa, M.² Kusukawa, K.³ Sinke, W.⁴

13
- 0000751559
- M. I. Alonso and K. Winer: Phys. Rev. B 39 (1989) 10056.
- (1989) Phys. Rev. B , vol.39 , pp. 10056
- Alonso, M.I.¹ Winer, K.²

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