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Volumn 42, Issue 4 B, 2003, Pages 1943-1948

Control of two types of dielectric relaxation current for Ta2O5 metal-insulator-metal capacitors

Author keywords

Dielectric relaxation current; Leakage current; MIM capacitor; Ta2O5; Tantalum pentoxide

Indexed keywords

ANNEALING; CAPACITORS; DIELECTRIC RELAXATION; DYNAMIC RANDOM ACCESS STORAGE; HYDROGEN; LEAKAGE CURRENTS; NITROGEN; OXIDATION; TANTALUM COMPOUNDS;

HYDROGEN DEOXIDATION; METAL-INSULATOR-METAL CAPACITOR;

MIM DEVICES;

EID: 0038010023 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.1943 Document Type: Article

Times cited : (14)

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