A method for making substrate-independent hardness measurements of soft metallic films on hard substrates by nanoindentation

Journal of Materials Research

Volumn 18, Issue 6, 2003, Pages 1383-1391

  Tsui, Ting Y ^a   Ross, C A ^b   Pharr, G M ^c  

^a Rice University   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c University of Tennessee   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HARDNESS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS;

NANOINDENTATION TECHNIQUES;

METALLIC FILMS;

EID: 0038000935     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0190     Document Type: Article

References (27)

1. W.C. Oliver, C.J. McHargue, and S.J. Zinkle, Thin Solid Films 153, 185 (1987).
2. W.C. Oliver and C.J. McHargue, Thin Solid Films 161, 117 (1988).
3. S.M. Gorbatkin, R.L. Rhodes, T.Y. Tsui, and W.C. Oliver, Appl. Phys. Lett. 65, 2672 (1994).
4. T.D. Shen, C.C. Koch, T.Y. Tsui, and G.M. Pharr, J. Mater. Res. 10, 2892 (1995).
5. M. Tabbal, P. Merel, M. Chaker, M.A. El Khakani, E.G. Herbert, B.N. Lucas, and M.E. O'Hern, J. Appl. Phys. 85, 3860 (1999).
6. S.V. Hainsworth, M.R. McGurk, and T.F. Page, Surf. Coat. Technol. 102, 97 (1998).
7. A.K. Bhattacharya and W.D. Nix, Int. J. Solids Struct. 24, 1287 (1988).
8. P.J. Burnett and D.S. Rickerby, Thin Solid Films 148, 41 (1987).
9. P.J. Burnett and D.S. Rickerby, Thin Solid Films 148, 51 (1987).
10. B. Jonsson and S. Hogmark, Thin Solid Films 114, 257 (1984).
11. R.B. King, Int. J. Solids Struct. 23, 1657 (1987).
12. H. Gao, C-H. Chui, and J. Lee, Int. J. Solids Struct. 29, 2471 (1992).
13. D. Stone, W.R. LaFontaine, P. Alexopoulos, T.W. Wu, and C-Y. Li, J. Mater. Res. 3, 141 (1988).
14. T.Y. Tsui, C.A. Ross, and G.M. Pharr, in Materials Reliability in Microelectronics VII, edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Sou (Mater. Res. Soc. Symp. Proc. 473, Warrendale, PA, 1997), p. 57.
15. T.Y. Tsui and G.M. Pharr, J. Mater. Res. 14, 292 (1999).
16. S. Bec, A. Tonck, J-M. Georges, E. Georges, and J-L. Loubet, Philos. Mag. A 74, 1061 (1996).
17. N.X. Randall, Philos. Mag. A 82, 1883 (2002).
18. Y.Y. Lim and M.M. Chaudhri, J. Mater. Res. 14, 2314 (1999).
19. A. Bolshakov and G.M. Pharr, J. Mater. Res. 13, 1049 (1998).
20. G.M. Pharr and A. Bolshakov, J. Mater. Res. 17, 2660 (2002).
21. T.A. Laursen and J.C. Simo, J. Mater. Res. 7, 618 (1992).
22. K. Miyahara, N. Nagashima, and S. Matsuoka, Philos. Mag. A 82, 2149 (2002).
23. W.R. La Fontaine, B. Yost, and C-Y. Li, J. Mater. Res. 5, 776 (1990).
24. W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992).
25. T.Y. Tsui, J.J. Vlassak, and W.D. Nix, J. Mater. Res. 14, 2196 (1999).
26. K.W. McElhaney, J.J. Vlassak, and W.D. Nix, J. Mater. Res. 13, 1300 (1998).
27. T.Y. Tsui, W.C. Oliver, and G.M. Pharr, in Thin Films: Stresses and Mechanical Properties VI, edited by W.W. Gerberich, H. Gao, J-E. Sundgren, and S.P. Baker (Mater. Res. Soc. Symp. Proc. 436, Warrendale, PA, 1997), p. 207.