The effects of post excimer laser annealing on (Ba,Sr)TiO3 thin films at low substrate temperatures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 4 A, 2003, Pages 1680-1685

  Shye, Der Chi ^a   Chiou, Bi Shiou ^a   Hwang, Chuan Chou ^a   Jaing, Cheng Chung ^b   Hsu, Hsien Wen ^a   Chen, Jyh Shin ^b   Cheng, Huang Chung ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

Author keywords

BST films; Crystallinity; Excimer laser annealing; Heat conduction; Light absorption; Low substrate temperature

Indexed keywords

AMORPHOUS FILMS; ANNEALING; BARIUM COMPOUNDS; ELECTRIC PROPERTIES; EXCIMER LASERS; LASER APPLICATIONS; LIGHT ABSORPTION; LOW TEMPERATURE EFFECTS; PERMITTIVITY; SPUTTERING; SUBSTRATES; THERMAL CONDUCTIVITY;

EXCIMER LASER ANNEALING; LASER ENERGY FLUENCE; LOW SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 0037931985     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.1680     Document Type: Article

References (18)

1. R. W. Babbitt, T. E. Koscica and W. C. Drach: Microwave J. 35 (1992) 63.
2. K. Ono, T. Horokawa, T. Shibano, N. Mikami, T. Kuroiwa, T. Kawahara, S. Matsuno, F. Uchikawa, S. Satoh and H. Abe: IEDM Tech. Dig., 1998, p. 803.
3. B. T. Lee, C. Y. Yoo, H. J. Lim, C. S. Kang, H. B. Park, W. D. Kim, S. H. Ju, H. Horii, K. H. Lee, H. W. Kim, S. I. Lee and M. Y. Lee: IEDM Tech. Dig., 1998, p. 815.
4. H. Yamaguchi et al.: IEDM Tech. Dig., 1996, p. 675.
5. T. Sakuma, S. Yamamichi, S. Matsubara, H. Yamaguchi and Y. Miyasaka: Appl. Phys. Lett. 57 (1990) 2431.
6. K. Heida et al.: IEDM Tech. Dig., p. 789.
7. S. Sone, H. Yabuta, Y. Kato, T. Iizuta, S. Yamamichi, H. Yamaguchi, P. Y. Lesaicherre, S. Nishimoto and M. Yoshida: Jpn. J. Appl. Phys. 35 (1996) 5089.
8. A. Marmorstein, A. T. Voutsas and R. Solanki: J. Appl. Phys. 82 (1997) 4303.
9. E. Fogarassy, S. Unamuno, P. Legagneux, F. Plais, D. Pribat, B. Godard and M. Stehle: Thin Solid Films 337 (1999) 143.
10. D. C. Shye, B. S. Chiou, C. C. Hwang, J. S. Chen, I. W. Su, C. C. Chou and H. C. Cheng: to be published in Proc. ISAF 2002, Nara, May 31, Jpn., IFFF 2002, ID: 31H-PP1-3P.
11. M. Adachi et al.: Landolt-Bornstein, Zahlenwerte und Funktionen aus Naturwissenschaften und Technik, Ferroelektrika und verwandte Substanzen, eds. K.-H. Hellwege and A. M. Hellewege (Springer-Verlag, Berlin, 1981) p. 59.
12. F. P. Incropera and D. P. De Witt: Introduction to heat transfer, 2nd edition (John Wiley & Sons, New York, 1990) p. 226.
13. C. F. Chou, H. C. Pan and C. C. Chou: to be published in Proc. ISIF 2002, Nara, May 31, Jpn., 2002, ID: 29C-CH1-3C.
14. N. H. Nickel, G. B. Anderson and R. I. Johnson: Phys. Rev. B 56 (1997) 12065.
15. D. M. Smyth, M. P. Harmer and P. J. Peng: J. Am. Ceram. Soc. 72 (1989) 2276.
16. M. S. Tsai and T. Y. Tseng: J. Electrochem. Soc. 145 (1998) 2583.
17. Martin Von Allmen and Andreas Blastter: Laser-Beam Interactions with Materials, Physical Principles and Applications (Second Edition) (Springer-Verlag, Berlin, 1995) p. 44.
18. P. Baeri, G. Foti, J. M. Poate and A. G. Cullis: Phys. Rev. Lett. 45 (1980) 2036.