Design of microsensor for gases and liquids flow measurements

Microelectronics Journal

Volumn 34, Issue 5-8, 2003, Pages 709-711

  Rodrigues, R J ^a   Furlan, R ^a,b  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

Fabrication; Flow microsensors; Microcalorimetric; Microsensors

Indexed keywords

CALORIMETRY; COMPUTER SIMULATION; FLOW MEASUREMENT; MICROELECTROMECHANICAL DEVICES;

FLOW MICROSENSORS;

MICROSENSORS;

EID: 0037905348     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(03)00108-3     Document Type: Conference Paper

References (7)

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