Electrochemical micromachining of titanium using laser oxide film lithography: Excimer laser irradiation of anodic oxide

Applied Surface Science

Volumn 211, Issue 1-4, 2003, Pages 113-127

  Chauvy, P F ^a   Hoffmann, P ^a   Landolt, D ^a  

^a EPFL   (Switzerland)

Author keywords

Electrochemical micromachining; Excimer laser; Oxide film laser lithography; Titanium oxide

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; EXCIMER LASERS; LITHOGRAPHY; MASKS; MICROMACHINING; OXIDES; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTROCHEMICAL MICROMACHINING;

ELECTROCHEMISTRY;

EID: 0037878071     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00256-3     Document Type: Article

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