Feasibility of tunable MEMS photonic crystal devices

Ultramicroscopy

Volumn 97, Issue 1-4, 2003, Pages 473-479

  Rajic, S ^a,b   Corbeil, J L ^b   Datskos, P G ^a,b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

MEMS; Photonic crystal; SOI; Spectrally tunable

Indexed keywords

CRYSTAL STRUCTURE; ELECTRON RESONANCE; ENERGY GAP; LITHOGRAPHY; NANOTECHNOLOGY; PERMITTIVITY; PHOTONS; SEMICONDUCTOR QUANTUM WELLS;

PHOTONIC BANDGAP CRYSTALS (PBC);

MICROELECTROMECHANICAL DEVICES;

SILICON;

ARTICLE; CHEMICAL STRUCTURE; CRYSTAL; CRYSTAL STRUCTURE; DEVICE; FEASIBILITY STUDY; GEOMETRY; MECHANICAL STRESS;

EID: 0037865566     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(03)00076-7     Document Type: Article

References (12)

1. Yablanovitch E. Phys. Rev. Lett. 58:1987;2059.
2. Joannopoulos J.D., Villeneuve P.R., Fan S. Nature. 386:1997;143.
3. Holtz J.H., Asher S.A. Lett. Nature. 389:1997;829.
4. Weissman J.M., Sunkara H.B., Tse A.S., Asher S.A. Science. 274:1996;959.
5. Kim S., Gopalan V. Appl. Phys. Lett. 78:2001;3015.
6. Foresi J.S., Villeneuve P.R., Ferrera J., Thoen E.R., Steinmeyer G., Fan S., Joannopoulos J.D., Kimerling L.C., Smith H.I., Ippen E.P. Nature. 390:1997;143.
7. W.C. Young, Roak's Formulas for Stress and Strain, 6th Edition, McGraw-Hill, New York, 1989, p. 714.
8. Website: http://memsnet.org/material.
9. Datskos P.G., Rajic S., Datskou I. Appl. Phys. Lett. 73:1998;2319.
10. Datskos P.G., Rajic S., Datskou I., Egert C.M. SPIE. 3978:1998;173.
11. Datskos P.G., Rajic S., Egert C.M., Datskou I. SPIE. 3698:1999;151.
12. Datskos P.G., Rajic S., Senesac L.R., Datskou I. Ultramicroscopy. 86:2001;191.