A low loss MEMS transmission line with shielded ground

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 136-139

  Park, Eun Chul ^a   Choi, Yun Suk ^a   Kim, Byeong Il ^a   Yoon, Jun Bo ^a   Yoon, Euisik ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC GROUNDING; ELECTRIC LOSSES; ELECTRIC SHIELDING; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; SUBSTRATES; WAVEGUIDES;

LOSSY SILICON SUBSTRATE; SHIELDED GROUND;

TRANSMISSION LINE THEORY;

EID: 0037818336     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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