Phase-shifting moiré method with an atomic force microscope

Applied Optics

Volumn 40, Issue 34, 2001, Pages 6193-6198

  Xie, Huimin ^a   Boay, Chai Gin ^a   Liu, Tong ^a   Lu, Yunguang ^b   Yu, Jin ^b   Asundi, Anand ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; HOLOGRAPHY; INTERFEROMETRY;

ELECTRONIC SPECKLE INTERFEROMETRY;

PHASE SHIFT;

EID: 0037811978     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.006193     Document Type: Article

References (9)

1. J. M. Huntely, “Automatic fringe pattern analysis in experimental mechanics: a review,” J. Strain Anal. 33, 105-125 (1998).
2. J. E. Greivenkamp and J. H. Bruning, “Phase shifting interferometers,” in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1992), Chap. 14.
3. R. S. Sirohi and F. S. Chau, Optical Methods of Measurement: Wholefield Techniques (Marcel Dekker, New York, 1999), Chap. 3.
4. H. Chen, D. Liu, and A. Lee, “Moire in atomic force microscope,” Exp. Tech. 24(1), 31-32 (2000).
5. H. Xie, S. Kishimoto, A. Asundi, G. B. Chai, N. Shinya, J. Yu, and B. K. A. Ngoi, “In-plane deformation measurement using the atomic force microscope moire method,” Nanotechnology 11(1), 24-29 (2000).
6. F.-P. Chiang, “Moire methods of strain analysis,” in Manual on Experimental Stress Analysis, 5th ed., J. F. Doyle and J. W. Philips, ed. (Society for Experimental Mechanics, Bethel, Conn., 1989).
7. H. Xie, C. G. Boay, and A. Asundi, “Thermal deformation measurement of electronic package using advanced moire methods,” in The Third Electronics Packaging Technology Conference, 5-7 December 2000, Singapore, IEEE Catalog 00EX456 (Institute of Electrical and Electronics Engineers, New York, 2000), pp. 163-168.
8. D. Post, B. Han, and P. Ifju, High Sensitivity Moire (Springer-Verlag, New York, 1994), Appendix B.
9. M. V. Salapaka, H. S. Bergh, J. Lai, A. Majumdar, and E. Mcfor-land, “Multimode noise analysis of cantilevers for the scanning probe microscope,” J. Appl. Phys. 71, 2480-2487 (1997).