Moire in atomic force microscope

Experimental Techniques

Volumn 24, Issue 1, 2000, Pages 31-32

  Chen, H ^a   Liu, D ^a   Lee, A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; LASER BEAMS; MICROSCOPES; MOIRE FRINGES; POLYMETHYL METHACRYLATES; ROTATION; SCANNING; SCANNING ELECTRON MICROSCOPY;

ATOMIC FORCE MICROSCOPE; ELECTRON BEAM MOIRE; MOIRE FRINGE PATTERNS;

ATOMIC FORCE MICROSCOPY;

EID: 0033886020     PISSN: 07328818     EISSN: None     Source Type: Trade Journal    
DOI: 10.1111/j.1747-1567.2000.tb01333.x     Document Type: Article

References (7)

1. Post, D., Han, B., and Ifju, P., High Sensitivity Moiré, Springer-Verlag, 1994.
2. Han, B., "Extension of Moiré Interferometry into the Ultra-High Sensitivity Domain," Ph.D. Dissertation, Virginia Polytechnic Institute and State University, 1991.
3. Liu, D. and Shakour, E., "Moiré Method for Simultaneous Microscopic Measurement and Observation," Proceedings of the 1999 SEM Spring Conference, Cincinnati, OH, June 7-9, 1999.
4. Dally, J.W. and Read, D.T., "Electron Beam Moiré," EXPERIMENTAL MECHANICS, 33(12), 270-277, 1993.
5. Smith, H.I., Chinn, S.R., and DeGraff, P.D., "Application of Moiré Techniques in Scanning-electron-beam Lithography and Microscopy," J. Vacuum Science Technology, 12(6), 1262-1265, 1975.
6. McCord, M.A. and Rooks, M.J., ed., Handbook of Microlithography, Micromachining and Microfabrication, SPIE, 1997.
7. Morse, S., Durelli, A.J., and Sciammarella, C.A., "Geometry of Moiré Fringes in Strain Analysis," J. Engineering Mechanics Div., Proc. American Society of Civil Engineering, 86(EM4), 105-126, 1960.