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Volumn 254, Issue 3-4, 2003, Pages 368-377

MOCVD of cobalt oxide thin films: Dependence of growth, microstructure, and optical properties on the source of oxidation

Author keywords

A3. Chemical vapor deposition processes; Al. Microstructure; Al. Optical bandgap; B1. Cobalt oxide; B1. Nitrous oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; COBALT COMPOUNDS; CRYSTALLIZATION; GROWTH KINETICS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; MORPHOLOGY; OPTICAL PROPERTIES; OXIDATION; PHASE COMPOSITION; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET SPECTROPHOTOMETERS; X RAY DIFFRACTION ANALYSIS;

EID: 0037809420     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(03)01156-4     Document Type: Article
Times cited : (72)

References (21)
  • 20
    • 0004193138 scopus 로고
    • Academic Press, New York, Chapter 4
    • J.L. Vossen, W. Kern, Thin Film Processes, Vol. I, Academic Press, New York, 1978, p. 336 (Chapter 4).
    • (1978) Thin Film Processes , vol.1 , pp. 336
    • Vossen, J.L.1    Kern, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.