Comment on "(Ta1-xNbx)2O5 films produced by atomic layer deposition: Temperature dependent dielectric spectroscopy and room-temperature i-v characteristics" [J. Appl. Phys. 90, 4532 (2001)]

Journal of Applied Physics

Volumn 93, Issue 12, 2003, Pages 10146-10147

  Brazis, R ^a   Pipinys, P ^a  

^a CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRON TRAPS; ELECTRON TUNNELING; PERMITTIVITY; SPECTROSCOPIC ANALYSIS; TANTALUM COMPOUNDS;

FRENKEL EMISSION;

THIN FILMS;

EID: 0037805178     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1571961     Document Type: Review

References (16)

1. M. Strømme, G. A. Niklassen; M. Ritala, M. Leskelá, and K. Kukli, J. Appl. Phys. 90, 4532 (2001)
2. F. C. Aris and T. J. Lewis, J. Phys. D 6, 1067 (1973).
3. D. M. Hughes and M. N. Jones, J. Phys. D 7, 2081 (1974).
4. P. L. Young, J. Appl. Phys. 47, 235 (1976).
5. H. Matsumoto, S. Tanaka, and T. Yakumoto, Jpn. J. Appl. Phys. 17, 1543 (1978).
6. F. M. Nazar and M. T. Atig, Int. J. Electron. 51, 1651 (1981).
7. G. S. Oehrlein, J. Appl. Phys. 59, 1587 (1986).
8. S. Ezhilvalan and T.-Y. Tsang, J. Appl. Phys. 83, 4797 (1998).
9. C. Chaneliere, S. Four, J. L. Autran, R. A. B. Devine, N. P. Sandler, and P. K. Chu, J. Appl. Phys. 83, 4823 (1998).
10. A. Kiveris, S. Kudžmauskas, and P. Pipinys, Phys. Status Solidi A 37, 321 (1976).
11. S. Makram-Ebeid and M. Lanoo, Phys. Rev. B 25, 6406 (1982).
12. R. Brazis, P. Pipinys, A. Rimeika, and V. Lapeika, J. Mater. Sci. Lett. 9, 266 (1990).
13. P. Migliorato, C. Reita, G. Tallarida, M. Quinn, and G. Fortunate, Solid-State Electron. 38, 2075 (1995).
14. P. Pipinys, A. Pipiniene, and A. Rimeika, J. Appl. Phys. 86, 6875 (1999).
15. F. I. Dalidchik, Zh. Eksp. Teor. Fiz. 74, 472 (1978).
16. J. Frenkel, Phys. Rev, 54, 647 (1938).