Atomic force microscopy and kelvin probe force microscopy measurements of semiconductor surface using carbon nanotube tip fabricated by electrophoresis

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 4 B, 2002, Pages 2615-2619

  Maeda, Chikashi ^a   Ozeki, Norihito ^a   Kishimoto, Shigeru ^a   Mizutani, Takashi ^a   Sugai, Toshiki ^a   Shinohara, Hisanori ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

AFM; Carbon nanotube; Electrophoresis; KFM

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROPHORESIS; SEMICONDUCTOR GROWTH; SILICON;

KFM; SPATIAL RESOLUTION;

CARBON NANOTUBES;

EID: 0037737093     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.2615     Document Type: Article

References (6)

1. H. Dai, J. H. Hafner, A. G. Rinzler, D. T. Colbert and R. E. Smalley: Nature 384 (1996) 147.
2. S. Akita, H. Nishijima, Y. Nakayama, F. Tokumasu and K. Takeyasu: J. Phys. D: Appl. Phys. 32 (1999) 1044.
3. J. H. Hafner, C. L. Cheung and C. M. Lieber: J. Am. Chem. Soc. 121 (1999) 9750.
4. W. Qian, G. S. Rohrer and M. Skowronski: Appl. Phys. Lett. 67 (1995) 2284.
5. T. Mizutani, T. Usunami, S. Kishimoto and K. Maezawa: Jpn. J. Appl. Phys. 38 (1999) L767.
6. S. Takahashi, T. Kishida, S. Akita and Y. Nakayama: Jpn. J. Appl. Phys. 40 (2001) 4314.