Growth of titanium dioxide films by cluster supersonic beams for VOC sensing applications

IEEE Sensors Journal

Volumn 3, Issue 2, 2003, Pages 199-205

  Toccoli, Tullio ^a   Capone, Simonetta ^a   Guerini, Luca ^a   Anderle, Mariano ^b   Boschetti, Andrea ^a   Iacob, Erica ^b   Micheli, Victor ^b   Siciliano, Pietro ^a   Iannotta, Salvatore ^a  

^a CNR   (Italy)

^b FONDAZIONE BRUNO KESSLER   (Italy)

Author keywords

Nanostructured thin films; Supersonic cluster beam deposition; TiO 2; VOC sensors

Indexed keywords

AGGLOMERATION; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; ETHANOL; HEAT TREATMENT; MASS SPECTROMETERS; METHANOL; NANOSTRUCTURED MATERIALS; PARAMETER ESTIMATION; RELIABILITY; SENSITIVITY ANALYSIS; VOLATILE ORGANIC COMPOUNDS; X RAY DIFFRACTION;

DEGREE OF AGGREGATION; NANOSTRUCTURED THIN FILMS; SUPERSONIC CLUSTER BEAM DEPOSITION; VOC SENSORS;

TITANIUM DIOXIDE;

EID: 0037721635     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.812627     Document Type: Article

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