Deposition of nanocrystalline metal films by cluster beams produced by a pulsed arc cluster ion source

Materials Science Forum

Volumn 235-238, Issue PART 1, 1997, Pages 267-272

  Barborini, E ^a   Piseri, P ^a   Milani, P ^a   Iannotta, S ^b  

^a UNIVERSITY OF MILAN   (Italy)

^b CNR   (Italy)

Author keywords

Metal clusters; Molecular beams; Nanocrystalline thin films

Indexed keywords

ION SOURCES; MASS SPECTROMETRY; METALLIC FILMS; MOLECULAR BEAMS; NICKEL; THIN FILMS; TITANIUM; TITANIUM DIOXIDE;

CLUSTER BEAM DEPOSITION; METAL CLUSTERS; NANOCRYSTALLINE FILMS;

NANOSTRUCTURED MATERIALS;

EID: 0030834956     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: None     Document Type: Article

References (9)

1. I. Yamada, Nucl. Instr. and Meth. B55, 544 (1991)
2. P. Melinon, G. Fuchs, B. Cabaud, A. Hoareau, P. Jensen, V. Paillard, and M. Treilleux, J. Phys. I 3, 1585 (1993)
3. P. Milani, and W.A. deHeer, Rev. Sci. Instrum. 61, 1835 (1990)
4. H. Gleiter, Prog. Mater. Sci. 33, 223 (1989)
5. C.Y. Cha, G. Gantefoer. and W. Eberhardt, Rev. Sci. Instrum. 63, 5661 (1992)
6. H.R. Siekmann, E. Holub-Krappe, Bu. Wrenger, Ch. Pettenkofer, and K.H. Meiwes-Broer, Z. Phys. B 90, 201 (1993)
7. P. Milani, P. Piseri, E. Barborini, and S. Iannotta, Materials Science Forum, 195, 43 (1995)
8. P. Piseri, E. Barborini, P. Milani in Metastable Phases and Microstructures, MRS symposium proc. 400, Pittsburg (1996), in press.
9. M. Bendaham, P. Canet, J-L. Seguin, and H. Carchano, Mat. Sci. Eng. B 34, 112 (1995).