Double modulated thermoreflectance microscopy of semiconductor devices

Journal of Applied Physics

Volumn 93, Issue 11, 2003, Pages 9043-9047

  Dietzel, D ^a   Bein, B K ^a   Pelzl, J ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTORS; ELECTRIC EXCITATION; ELECTRIC INSULATORS; ENERGY GAP; ION BEAMS;

OPTICAL EXCITATION;

SEMICONDUCTOR DEVICES;

EID: 0037666159     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1572196     Document Type: Article

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