Ion irradiation effects in platinum oxide films

Journal of Applied Physics

Volumn 93, Issue 11, 2003, Pages 9030-9037

  Machalett, F ^a   Gartner K ^a   Edinger, K ^b,d   Diegel, M ^c  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b University of Maryland   (United States)

^c LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

^d NaWoTec GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; IRRADIATION; PLATINUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTERING;

ION IRRADIATION;

THIN FILMS;

EID: 0037636418     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1572973     Document Type: Article

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