An alternative method for metallization by laser and ion beam irradiation

Microelectronic Engineering

Volumn 60, Issue 3-4, 2002, Pages 429-437

  Machalett, F ^a,b   Edinger, K ^b   Diegel, M ^c   Steenbeck, K ^c  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b UNIVERSITY OF MARYLAND   (United States)

^c LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Interconnects; Ion irradiation; Laser application; Metallization

Indexed keywords

FOCUSING; ION BEAMS; LARGE SCALE SYSTEMS; LASER APPLICATIONS; LASER BEAM EFFECTS; MAGNETRON SPUTTERING; MASKS; METALLIC FILMS; PLASMAS; PLATINUM COMPOUNDS; THIN FILMS;

ION BEAM IRRADIATION;

METALLIZING;

EID: 0036532440     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00703-1     Document Type: Article

References (13)

1. Focused ion beams