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Applied Physics A: Materials Science and Processing

Volumn 71, Issue 3, 2000, Pages 331-335

Direct patterning of gold oxide thin films by focused ion-beam irradiation

(6) Machalett, F a,b Edinger, K b Melngailis, J b Diegel, M c Steenbeck, K c Steinbeiss, E c

a FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

b UNIVERSITY OF MARYLAND (United States)

c LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DECOMPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; FILM PREPARATION; GOLD COMPOUNDS; HEATING; ION BEAMS; LASER BEAM EFFECTS; MAGNETRON SPUTTERING; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS;

FOCUSED ION BEAM IRRADIATION; GOLD OXIDE THIN FILMS;

THIN FILMS;

EID: 0034274777 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390000598 Document Type: Article

Times cited : (30)

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