Using the speed of sound for in situ calibration of mass flow controllers

Review of Scientific Instruments

Volumn 71, Issue 9, 2000, Pages 3461-3463

  Wajid, Abdul ^a  

^a Leybold Inficon   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037627429     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1287749     Document Type: Article

References (8)

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5. J. P. Stagg, Chemtronics 3, 44 (1988).
6. Composer is a registered trade mark of Leybold Inficon, US patent number 05768937 (June 23, 1998).
7. MKS Instruction manual, 111858-P1, MKS Instruments, Sec. 6.
8. J. J. Hurly, AIP Conf. Proc. 449, 923 (1998).