Silica waveguides fabricated by oxidization of selectively anodized porous silicon

Applied Physics Letters

Volumn 82, Issue 16, 2003, Pages 2559-2561

  Nagata, Seiichi ^a   Matsushita, Shinobu ^a   Saito, Kazuya ^a   Ohshita, Yoshio ^a   Maeda, Yoshinobu ^a   Yamaguchi, Masafumi ^a   Ikushima, Akira J ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CLADDING (COATING); CURRENT DENSITY; INTERFACES (MATERIALS); SILICA; WAVEGUIDES;

OXIDIZATION;

POROUS SILICON;

EID: 0037546927     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1567815     Document Type: Article

References (20)

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