Optical study of porous silicon buried waveguides fabricated from p-type silicon

Materials Science in Semiconductor Processing

Volumn 3, Issue 5-6, 2000, Pages 357-361

  Charrier, J ^a   Lupi, C ^b   Haji, L ^a   Boisrobert, C ^b  

^a UNIVERSITÉ DE RENNES 1   (France)

^b UNIVERSITÉ DE NANTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED OPTICS; OXIDATION; POROSITY; POROUS SILICON; REFRACTIVE INDEX; SILICON WAFERS;

GRADED INDEX WAVEGUIDES; NEAR FIELD PATTERN;

OPTICAL WAVEGUIDES;

EID: 0034291281     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(00)00056-1     Document Type: Article

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