Combinatorial hot-wire CVD approach to exploring thin-film Si materials and devices

Thin Solid Films

Volumn 430, Issue 1-2, 2003, Pages 78-82

  Wang, Qi ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

c Si; a Si:H; Combinatorial approach; HWCVD

Indexed keywords

AUTOMATION; CHEMICAL VAPOR DEPOSITION; HEATING; HYDROGENATION; OPTIMIZATION; SOLAR CELLS; SUBSTRATES; THIN FILM DEVICES;

HOT-WIRE CHEMICAL VAPOR DEPOSITION (HWCVD);

AMORPHOUS SILICON;

EID: 0037513308     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00076-2     Document Type: Conference Paper

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