Real time analysis of amorphous and microcrystalline silicon film growth by multichannel ellipsometry

Thin Solid Films

Volumn 364, Issue 1, 2000, Pages 129-137

  Collins, R W ^a   Koh, Joohyun ^a   Ferlauto, A S ^a   Rovira, P I ^a   Lee, Yeeheng ^a   Koval, R J ^a   Wronski, C R ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; ELLIPSOMETRY; FILM GROWTH; HYDROGENATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS; SPECTROSCOPIC ANALYSIS; SUBSTRATES; THIN FILMS;

MICROCRYSTALLINE FILMS; MULTICHANNEL SPECTROSCOPIC ELLIPSOMETRY;

SEMICONDUCTING FILMS;

EID: 0033890533     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00925-6     Document Type: Article

References (24)

1. Collins R.W. Rev. Sci. Instrum. 61:1990;2029.
2. Johs B., Doerr D., Pittal S., Bhat I.B., Dakshinamurthy S. Thin Solid Films. 233:1993;293.
3. Duncan W.M., Henck S.A. Appl. Surf. Sci. 63:1993;9.
4. Pickering C. Hurle D.T.J. Handbook of Crystal Growth. 1994;817 Elsevier, Amsterdam.
5. Collins R.W., An I., Nguyen H.V., Li Y.M., Lu Y. Vedam K. Physics of Thin Films, Vol. 19. 1994;49 Academic, New York.
6. Tsai C.C., Knights J.C., Chang G., Wacker B. J. Appl. Phys. 59:1986;2998.
7. Ganguly G., Matsuda A. Phys. Rev. B. 47:1993;3661.
8. Doughty D.A., Doyle J.R., Lin G.H., Gallagher A. J. Appl. Phys. 67:1990;6220.
9. Lu Y., Kim S., Gunes M., Lee Y., Wronski C.R., Collins R.W. MRS Symp. Proc. 336:1994;595.
10. Tsu D.V., Chao B.S., Ovshinsky S.R., Guha S., Yang J. Appl. Phys. Lett. 71:1997;1317.
11. Koh J., Lee Y., Fujiwara H., Wronski C.R., Collins R.W. Appl. Phys. Lett. 73:1998;1526.
12. Lee J., Rovira P.I., An I., Collins R.W. Rev. Sci. Instrum. 69:1998;1800.
13. Collins R.W., Koh J., Fujiwara H., Rovira P.I., Ferlauto A.S., Zapien J.A., Wronski C.R., Messier R. Hess P., Boyd I.W., Hanabusa M., Peled A. Proc. Spring 1999 E-MRS Meeting, Symposium A. 1999;. in press.
14. Koh J., Fujiwara H., Lee Y., Wronski C.R., Collins R.W. MRS Symp. Proc. 536:1999;451.
15. Shirai H., Das D., Hanna J., Shimizu I. Appl. Phys. Lett. 59:1991;1096.
16. Kroll U., Meier J., Shah A., Mikhailov S., Weber J. J. Appl. Phys. 80:1996;4971.
17. Jellison G.E. Jr., Modine F.A. Appl. Phys. Lett. 69:1996;2137.
18. A. Ferlauto, J. Koh, C.R. Wronski, R.W. Collins, unpublished results.
19. Street R.A. Phys. Rev. B. 43:1991;2454.
20. Osborne I.S., Hata N., Matsuda A. J. Non-Cryst. Solids. 198-200:1996;991.
21. Okamoto S., Hishikawa Y., Tsuda S. Jpn. J. Appl. Phys. 35:1996;26.
22. Koh J., Fujiwara H., Wronski C.R., Collins R.W. MRS Symp. Proc. 467:1997;705.
23. Nguyen H.V., Lu Y., Kim S., Wakagi M., Collins R.W. Phys. Rev. Lett. 74:1995;3880.
24. Lee Y., Jiao L., Liu H., Lu Z., Collins R.W., Wronski C.R. Conf. Record 25th IEEE Photovoltaics Specialists Conference. 1996;1165 IEEE, New York.